{"id":2056,"date":"2022-04-26T09:33:21","date_gmt":"2022-04-26T01:33:21","guid":{"rendered":"http:\/\/www.zenh.com\/?p=2056"},"modified":"2022-05-16T14:49:21","modified_gmt":"2022-05-16T06:49:21","slug":"2056","status":"publish","type":"post","link":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/2022\/04\/26\/2056.html\/","title":{"rendered":"FIB \u805a\u7126\u79bb\u5b50\u675f\u5206\u6790"},"content":{"rendered":"<div class=\"section mcb-section \">\n<div class=\"section_wrapper mcb-section-inner\">\n<div class=\"wrap mcb-wrap one valign-top clearfix\">\n<div class=\"mcb-wrap-inner\">\n<div class=\"column mcb-column one column_visual \">\n<h3>FIB\u4ecb\u7ecd<\/h3>\n<p><strong>\u805a\u7126\u79bb\u5b50\u675f\u6280\u672f<\/strong>\uff08Focused Ion beam\uff0cFIB\uff09\u662f\u5229\u7528\u7535\u900f\u955c\u5c06\u79bb\u5b50\u675f\u805a\u7126\u6210\u975e\u5e38\u5c0f\u5c3a\u5bf8\u7684\u79bb\u5b50\u675f\u8f70\u51fb\u6750\u6599\u8868\u9762\uff0c\u5b9e\u73b0\u6750\u6599\u7684\u5265\u79bb\u3001\u6c89\u79ef\u3001\u6ce8\u5165\u3001\u5207\u5272\u548c\u6539\u6027\u3002\u968f\u7740\u7eb3\u7c73\u79d1\u6280\u7684\u53d1\u5c55\uff0c\u7eb3\u7c73\u5c3a\u5ea6\u5236\u9020\u4e1a\u53d1\u5c55\u8fc5\u901f\uff0c\u800c\u7eb3\u7c73\u52a0\u5de5\u5c31\u662f\u7eb3\u7c73\u5236\u9020\u4e1a\u7684\u6838\u5fc3\u90e8\u5206\uff0c\u7eb3\u7c73\u52a0\u5de5\u7684\u4ee3\u8868\u6027\u65b9\u6cd5\u5c31\u662f\u805a\u7126\u79bb\u5b50\u675f\u3002\u8fd1\u5e74\u6765\u53d1\u5c55\u8d77\u6765\u7684<strong>\u805a\u7126\u79bb\u5b50\u675f\u6280\u672f<\/strong>\uff08FIB\uff09\u5229\u7528\u9ad8\u5f3a\u5ea6\u805a\u7126\u79bb\u5b50\u675f\u5bf9\u6750\u6599\u8fdb\u884c\u7eb3\u7c73\u52a0\u5de5\uff0c\u914d\u5408\u626b\u63cf\u7535\u955c\uff08SEM\uff09\u7b49\u9ad8\u500d\u6570\u7535\u5b50\u663e\u5fae\u955c\u5b9e\u65f6\u89c2\u5bdf\uff0c\u6210\u4e3a\u4e86\u7eb3\u7c73\u7ea7\u5206\u6790\u3001\u5236\u9020\u7684\u4e3b\u8981\u65b9\u6cd5\u3002\u76ee\u524d\u5df2\u5e7f\u6cdb\u5e94\u7528\u4e8e\u534a\u5bfc\u4f53\u96c6\u6210\u7535\u8def\u4fee\u6539\u3001\u79bb\u5b50\u6ce8\u5165\u3001\u5207\u5272\u548c\u6545\u969c\u5206\u6790\u7b49\u3002\u3001<\/p>\n<h3>\u5e94\u7528\u9886\u57df<\/h3>\n<p>\uff081\uff09\u7ebf\u8def\u4fee\u6539-\u5728IC\u751f\u4ea7\u5de5\u827a\u4e2d\uff0c\u53d1\u73b0\u5fae\u533a\u7535\u8def\u8680\u523b\u6709\u9519\u8bef\uff0c\u53ef\u5229\u7528FIB\u7684\u5207\u5272\uff0c\u65ad\u5f00\u539f\u6765\u7684\u7535\u8def\uff0c\u518d\u4f7f\u7528\u5b9a\u533a\u57df\u55b7\u91d1\uff0c\u642d\u63a5\u5230\u5176\u4ed6\u7535\u8def\u4e0a\uff0c\u5b9e\u73b0\u7535\u8def\u4fee\u6539\uff0c\u6700\u9ad8\u7cbe\u5ea6\u53ef\u8fbe5nm\u3002<\/p>\n<p>\uff082\uff09\u4ea7\u54c1\u8868\u9762\u5b58\u5728\u5fae\u7eb3\u7c73\u7ea7\u7f3a\u9677\uff0c\u5982\u5f02\u7269\u3001\u8150\u8680\u3001\u6c27\u5316\u7b49\u95ee\u9898\uff0c\u9700\u89c2\u5bdf\u7f3a\u9677\u4e0e\u57fa\u6750\u7684\u754c\u9762\u60c5\u51b5\uff0c\u5229\u7528FIB\u5c31\u53ef\u4ee5\u51c6\u786e\u5b9a\u4f4d\u5207\u5272\uff0c\u5236\u5907\u7f3a\u9677\u4f4d\u7f6e\u622a\u9762\u6837\u54c1\uff0c\u518d\u5229\u7528SEM\u89c2\u5bdf\u754c\u9762\u60c5\u51b5\u3002<\/p>\n<p>\uff083\uff09\u5fae\u7c73\u7ea7\u5c3a\u5bf8\u7684\u6837\u54c1\uff0c\u7ecf\u8fc7\u8868\u9762\u5904\u7406\u5f62\u6210\u8584\u819c\uff0c\u9700\u8981\u89c2\u5bdf\u8584\u819c\u7684\u7ed3\u6784\u3001\u4e0e\u57fa\u6750\u7684\u7ed3\u5408\u7a0b\u5ea6\uff0c\u53ef\u5229\u7528FIB\u5207\u5272\u5236\u6837\uff0c\u518d\u4f7f\u7528SEM\u89c2\u5bdf\u3002<\/p>\n<\/div>\n<div class=\"column mcb-column one-second column_image \">\n<div class=\"image_frame image_item no_link scale-with-grid aligncenter no_border\">\n<div class=\"image_wrapper\"><img loading=\"lazy\" class=\"scale-with-grid\" src=\"data:image\/gif;base64,R0lGODdhAQABAPAAAP\/\/\/wAAACwAAAAAAQABAEACAkQBADs=\" data-lazy-src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/%E5%9B%BE%E7%89%8711.png\" alt=\"FEI V400\" width=\"227\" height=\"227\" \/><noscript><img loading=\"lazy\" class=\"scale-with-grid\" src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/%E5%9B%BE%E7%89%8711.png\" alt=\"FEI V400\" width=\"227\" height=\"227\" \/><\/noscript><\/div>\n<p class=\"wp-caption-text\">FEI V400<\/p>\n<\/div>\n<\/div>\n<div class=\"column mcb-column one-second column_visual \">\n<p>\u4f7f\u7528\u8bbe\u5907\uff1aFEI V400<\/p>\n<p>\u53ef\u4ee5\u9488\u5bf914nm,16nm,28nm, 40nm, 45nm, 65nm, .13um, .18um, .25um, .35um \u5236\u7a0b\u8fdb\u884c\u7ebf\u8def\u6539\u9020\u3002\u9002\u7528\u7684\u5c01\u88c5\u5f62\u5f0fBGA, QFN, CSP, WLBGA, Die and board Level, 8\u201d wafer, packaged \u201cflip-chip\u201d<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<div class=\"section the_content has_content\">\n<div class=\"section_wrapper\">\n<div class=\"the_content_wrapper\">\n<p>&nbsp;<\/p>\n<table>\n<tbody>\n<tr>\n<td colspan=\"2\" width=\"568\">FIB\u5178\u578b\u7167\u7247<\/td>\n<\/tr>\n<tr>\n<td width=\"279\">\u89c2\u6d4b<\/td>\n<td width=\"288\">\u7ebf\u8def\u4fee\u6539<\/td>\n<\/tr>\n<tr>\n<td width=\"279\"><img loading=\"lazy\" class=\"aligncenter size-full wp-image-994 lazyloaded\" src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/%E5%9B%BE%E7%89%8712.png\" sizes=\"(max-width: 227px) 100vw, 227px\" srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712.png 227w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-159x146.png 159w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-50x46.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-81x75.png 81w\" alt=\"\" width=\"227\" height=\"209\" data-lazy-src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712.png\" data-lazy-srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712.png 227w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-159x146.png 159w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-50x46.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724712-81x75.png 81w\" data-lazy-sizes=\"(max-width: 227px) 100vw, 227px\" \/><\/td>\n<td width=\"288\"><img loading=\"lazy\" class=\"aligncenter size-full wp-image-995 lazyloaded\" src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/%E5%9B%BE%E7%89%8713.png\" sizes=\"(max-width: 240px) 100vw, 240px\" srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713.png 240w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-161x146.png 161w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-50x45.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-83x75.png 83w\" alt=\"\" width=\"240\" height=\"218\" data-lazy-src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713.png\" data-lazy-srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713.png 240w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-161x146.png 161w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-50x45.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724713-83x75.png 83w\" data-lazy-sizes=\"(max-width: 240px) 100vw, 240px\" \/><\/td>\n<\/tr>\n<tr>\n<td colspan=\"2\" width=\"568\">FIB\u914d\u5408TEM\u8fdb\u884c\u590d\u6742\u64cd\u4f5c<\/td>\n<\/tr>\n<tr>\n<td colspan=\"2\" width=\"568\">\u00a0<img loading=\"lazy\" class=\"aligncenter size-full wp-image-996 lazyloaded\" src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/%E5%9B%BE%E7%89%8714.png\" sizes=\"(max-width: 554px) 100vw, 554px\" srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714.png 554w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-300x138.png 300w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-260x119.png 260w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-50x23.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-150x69.png 150w\" alt=\"\" width=\"554\" height=\"254\" data-lazy-src=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714.png\" data-lazy-srcset=\"http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714.png 554w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-300x138.png 300w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-260x119.png 260w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-50x23.png 50w, http:\/\/www.zenh.com\/wp-content\/uploads\/2017\/05\/\u56fe\u724714-150x69.png 150w\" data-lazy-sizes=\"(max-width: 554px) 100vw, 554px\" \/><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p>&nbsp;<\/p>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>FIB\u4ecb\u7ecd \u805a\u7126\u79bb\u5b50\u675f\u6280\u672f\uff08Focused Ion <span class=\"excerpt-hellip\"> [\u2026]<\/span><\/p>\n","protected":false},"author":1,"featured_media":2308,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[75],"tags":[80],"_links":{"self":[{"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/posts\/2056"}],"collection":[{"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/comments?post=2056"}],"version-history":[{"count":2,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/posts\/2056\/revisions"}],"predecessor-version":[{"id":2059,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/posts\/2056\/revisions\/2059"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/media\/2308"}],"wp:attachment":[{"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/media?parent=2056"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/categories?post=2056"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xn--s1v39c40bow9c.com\/index.php\/wp-json\/wp\/v2\/tags?post=2056"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}